March Plasma Systems Receives Purchase Order for FlexTRAK-WR 200 mm Wafer Processing System

March Plasma Systems Receives Purchase Order for FlexTRAK-WR 200 mm Wafer Processing System

April 05, 2007

    CONCORD, Calif., April 5 /Xinhua-PRNewswire/ -- March
Plasma Systems, a subsidiary of Nordson Corporation
(Nasdaq: NDSN) announced today it has received a firm
purchase order for a FlexTRAK-WR wafer processing system
from a major semiconductor manufacturing company.  

    (Logo: 
http://www.newscom.com/cgi-bin/prnh/20070228/SFW073LOGO)

    The system is scheduled to be delivered the first half
of 2007, where it will be installed for the purpose of
high-volume semiconductor device manufacturing on 200 mm
wafers.  

    "The FlexTRAK-WR system continues to gain
acceptance by major semiconductor customers for photoresist
descum, wafer cleaning, etching and other wafer
applications," said James Getty, Director of
Applications at March Plasma Systems.  

    "The FlexTRAK-WR system provides advanced
processing capabilities at an attractive price point with a
low cost of ownership," Mr. Getty continued. 
"Because it demonstrates excellent on-wafer
performance combined with high throughput, it is an
appealing choice for high-volume semiconductor device
manufacturers."    

    The FlexTRAK-WR "200" system is for
processing wafers up to 200 mm in diameter in open
cassettes or SMIF pods.  The FlexTRAK-WR "300"
system is for wafers up to 300 mm in diameter in FOUP pods.
 The FlexTRAK-WR system is designed for plasma applications
such as photoresist descum, ashing, etching, surface
cleaning and contamination removal.  The system has a
proprietary plasma chamber design and fully integrated
wafer handler that provides exceptional on-wafer
performance, error-free wafer handling and best-in-class
throughput.  

    To learn more about March's advanced FlexTRAK-WR plasma
processing system for wafers, visit our web site at
www.marchplasma.com.

    About March Plasma Systems:  

    March Plasma Systems is the global leader in plasma
processing technology for the semiconductor, PCB, life
science, and microelectronics industries.  March has
offices and applications laboratories worldwide, including
California, Florida, Europe, Singapore, China, Japan, Korea
and Taiwan.  With over 20 years of continuous innovation,
March designs and manufactures a complete line of
award-winning and patented plasma processing systems.  An
expert staff of scientists and engineers is available to
assist in the development of plasma processes that improve
both product reliability and increase production yields. 
See the March Plasma Systems web site for more details:
http://www.marchplasma.com .  

    March Plasma Systems, Inc. is a wholly owned subsidiary
of Nordson Corporation, the world's leading producer of
precision dispensing equipment.  


    For more information contact:  

    March Plasma Systems, Inc. (International Headquarters)
 
     Scott Szymanski
     2470-A Bates Avenue  
     Concord, CA USA 94520  
     TEL: [phone]  

     Stephen Sowinski
     Communications
     TEL: [phone]