Brooks Automation Wins Significant Order from Jusung for Multiple Vacuum Automation Systems

Brooks Automation Wins Significant Order from Jusung for Multiple Vacuum Automation Systems

July 20, 2006

Leading Korean Semiconductor Equipment Maker Selects Market-leading Brooks GX6000 as its Vacuum Automation System Platform

    CHELMSFORD, Mass., July 20 /Xinhua-PRNewswire/ --
Brooks Automation, Inc. (Nasdaq: BRKS), which develops and
produces hardware, software and systems for the
semiconductor and other complex manufacturing industries,
today announced that Jusung Engineering Ltd. (SEO: 036930),
an equipment manufacturer based in Kyungkido, South Korea,
recently placed a significant multi-million dollar order
for Brooks' proven Gemini Express(TM) 6000 (GX6000) vacuum
system. The GX6000 features an industry standard cluster
configuration utilizing the Brooks patented direct drive
vacuum robot for highly reliable, high throughput wafer
transport in a critical vacuum environment.  The GX6000
will be employed as the backbone for semiconductor wafer
transport in Jusung's leading edge 300mm deposition and
other critical processes.

    Young-Gon Lee, executive vice-president of sales and
marketing of Jusung Engineering, said, "We have
continuously challenged ourselves at Jusung to be the best
at what we do.  We have recently won significant new
business from semiconductor customers not only in Korea but
also in the United States, Taiwan, Japan, France and Germany
for our process equipment.  We have received a lot of
interest in our new unique semi-batch design for atomic
layer deposition, or ALD, for dielectric and metal film,
which maximizes throughput with excellent film uniformity. 
The GX6000 system is the ideal platform for our application.
 We view Brooks as a valuable partner that provides us with
industry-best substrate-handling technology that should
help us increase our value to our global customers."

    Edward C. Grady, president and chief executive officer
of Brooks Automation, said, "We are pleased to be
selected by Jusung Engineering for its advanced
applications targeted at leading edge geometries.  Brooks
already provides transport systems for Jusung's LCD process
equipment used by FPD manufacturers in Korea, Taiwan and
China.  We are glad to expand this relationship with Jusung
to the semiconductor market.  It has been a priority for
Brooks to increase our presence in Asia, with a strong base
of operations in Korea.  I am pleased with the efforts of
our local team, led by our regional president Hoon Shin, in
solidifying our relationship as a long-term partner with
this important customer.  We are also well positioned for
additional vacuum systems business with Jusung."

    The Brooks GX6000 can support up to four process
modules and two load locks.  It is integrated with the
atmospheric equipment front end module (EFEM) and can
support up to four load ports.  The GX6000 is ideally
suited for a wide range of semiconductor processes carried
out in vacuum such as PVD, CVD, ALD, Cleaning, Ashing, RTP,
and Etch.

    About Brooks Automation, Inc.

    Brooks is a leading worldwide provider of automation
solutions and integrated subsystems to the global
semiconductor and related industries.  The company's
advanced offerings in hardware, software and services can
help customers improve manufacturing efficiencies,
accelerate time-to-market and reduce cost of ownership. 
Brooks products and global services are used in virtually
every semiconductor fab in the world as well as in a number
of diverse industries outside of semiconductor
manufacturing.  For more information, visit
http://www.brooks.com .

    About Jusung Engineering, Ltd.

    Jusung Engineering develops, manufactures and provides
critical process equipment to the global semiconductor and
LCD flat panel display manufacturing industries.  Founded
in 1995, Jusung is dedicated to being the best-in-class
equipment manufacturer and achieving total customer
satisfaction.  Jusung provides equipment for critical
semiconductor processes such as ALD, anneal, etch and a
range of CVD applications.  In addition, Jusung provides
advanced PECVD equipment for the LCD flat panel
manufacturing industry, ranging from Generation 5.5 to
Generation 7.5 glass sizes.  For more information, visit
http://www.jsung.com .

    Safe Harbor Statement under Section 21E of the
Securities Exchange Act of 1934.  Some statements in this
press release are forward-looking statements made under
Section 21E of the Securities Exchange Act of 1934.  They
include statements concerning the capabilities of certain
Brooks' products and their suitability for particular types
of applications.  These statements are neither promises nor
guarantees but involve risks and uncertainties, both known
and unknown, that could cause Brooks to experience results
that differ materially from our expectations.  These
statements are based on current management expectations and
analysis. As a result we can provide no assurance that our
future results will not be materially different from those
projected. The Company undertakes no obligation to revise
or update any forward-looking statements, or to make any
other forward-looking statements, whether as a result of
new information, future events or otherwise. 

    For more information, please contact:

     Mark Chung
     Director of Investor Relations 
     Brooks Automation, Inc.
     Tel:   [phone]
     Email: [e-mail]

SOURCE  Brooks Automation, Inc.