2007'02.04.Sun
Brooks Automation Wins Significant Order from Jusung for Multiple Vacuum Automation Systems

July 20, 2006

Leading Korean Semiconductor Equipment Maker Selects Market-leading Brooks GX6000 as its Vacuum Automation System Platform
CHELMSFORD, Mass., July 20 /Xinhua-PRNewswire/ -- Brooks Automation, Inc. (Nasdaq: BRKS), which develops and produces hardware, software and systems for the semiconductor and other complex manufacturing industries, today announced that Jusung Engineering Ltd. (SEO: 036930), an equipment manufacturer based in Kyungkido, South Korea, recently placed a significant multi-million dollar order for Brooks' proven Gemini Express(TM) 6000 (GX6000) vacuum system. The GX6000 features an industry standard cluster configuration utilizing the Brooks patented direct drive vacuum robot for highly reliable, high throughput wafer transport in a critical vacuum environment. The GX6000 will be employed as the backbone for semiconductor wafer transport in Jusung's leading edge 300mm deposition and other critical processes. Young-Gon Lee, executive vice-president of sales and marketing of Jusung Engineering, said, "We have continuously challenged ourselves at Jusung to be the best at what we do. We have recently won significant new business from semiconductor customers not only in Korea but also in the United States, Taiwan, Japan, France and Germany for our process equipment. We have received a lot of interest in our new unique semi-batch design for atomic layer deposition, or ALD, for dielectric and metal film, which maximizes throughput with excellent film uniformity. The GX6000 system is the ideal platform for our application. We view Brooks as a valuable partner that provides us with industry-best substrate-handling technology that should help us increase our value to our global customers." Edward C. Grady, president and chief executive officer of Brooks Automation, said, "We are pleased to be selected by Jusung Engineering for its advanced applications targeted at leading edge geometries. Brooks already provides transport systems for Jusung's LCD process equipment used by FPD manufacturers in Korea, Taiwan and China. We are glad to expand this relationship with Jusung to the semiconductor market. It has been a priority for Brooks to increase our presence in Asia, with a strong base of operations in Korea. I am pleased with the efforts of our local team, led by our regional president Hoon Shin, in solidifying our relationship as a long-term partner with this important customer. We are also well positioned for additional vacuum systems business with Jusung." The Brooks GX6000 can support up to four process modules and two load locks. It is integrated with the atmospheric equipment front end module (EFEM) and can support up to four load ports. The GX6000 is ideally suited for a wide range of semiconductor processes carried out in vacuum such as PVD, CVD, ALD, Cleaning, Ashing, RTP, and Etch. About Brooks Automation, Inc. Brooks is a leading worldwide provider of automation solutions and integrated subsystems to the global semiconductor and related industries. The company's advanced offerings in hardware, software and services can help customers improve manufacturing efficiencies, accelerate time-to-market and reduce cost of ownership. Brooks products and global services are used in virtually every semiconductor fab in the world as well as in a number of diverse industries outside of semiconductor manufacturing. For more information, visit http://www.brooks.com . About Jusung Engineering, Ltd. Jusung Engineering develops, manufactures and provides critical process equipment to the global semiconductor and LCD flat panel display manufacturing industries. Founded in 1995, Jusung is dedicated to being the best-in-class equipment manufacturer and achieving total customer satisfaction. Jusung provides equipment for critical semiconductor processes such as ALD, anneal, etch and a range of CVD applications. In addition, Jusung provides advanced PECVD equipment for the LCD flat panel manufacturing industry, ranging from Generation 5.5 to Generation 7.5 glass sizes. For more information, visit http://www.jsung.com . Safe Harbor Statement under Section 21E of the Securities Exchange Act of 1934. Some statements in this press release are forward-looking statements made under Section 21E of the Securities Exchange Act of 1934. They include statements concerning the capabilities of certain Brooks' products and their suitability for particular types of applications. These statements are neither promises nor guarantees but involve risks and uncertainties, both known and unknown, that could cause Brooks to experience results that differ materially from our expectations. These statements are based on current management expectations and analysis. As a result we can provide no assurance that our future results will not be materially different from those projected. The Company undertakes no obligation to revise or update any forward-looking statements, or to make any other forward-looking statements, whether as a result of new information, future events or otherwise. For more information, please contact: Mark Chung Director of Investor Relations Brooks Automation, Inc. Tel: +1-978-262-2459 Email: mark.chung@brooks.com SOURCE Brooks Automation, Inc.
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